RF-MEMS器件及其关键工艺技术
RF-MEMS 不仅在体积上小于传统射频器件，易于单片集成，且其性能也优于传统射频器件，此外，RF-MEMS 还可以实现器件多功能配置，如可重构天线。因此，RF-MEMS近年来已成为全世界范围...
RF-MEMS技术资料
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🔥 RF-MEMS热门资料
MEMS-based+Circuits+and+Systems
Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS reso...
📂 RF-MEMS资料分类