资源详细信息
High+Performance+RF+MEMS - 资源详细说明
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed
ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale.
The concept of MEMS is attributed to Richard Feynman’s famous talk on December
29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development
with his insight in microphysics. In particular, material properties in the µm scale are
differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication
technology has been a major driving force of MEMS development.
ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale.
The concept of MEMS is attributed to Richard Feynman’s famous talk on December
29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development
with his insight in microphysics. In particular, material properties in the µm scale are
differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication
technology has been a major driving force of MEMS development.
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