MEMS谐振器及其制造方法,以及MEMS振荡器
200680048256-MEMS谐振器及其制造方法,以及MEMS振荡器...
用MEMS加速度计技术资料
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Bio-MEMS - Technologies and Applications
Applications of microelectromechanical systems (MEMS) and microfabrica- tion have spread to different fields of engineering and science in recent year...
CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies ...
High+Performance+RF+MEMS
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. T...
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