微机电系统（MEMS,Micro-Electro-MechanicalSystem），也叫做微电子机械系统、微系统、微机械等，指尺寸在几毫米乃至更小的高科技装置。
Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a ...
For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and...
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosensean...
A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. ...
Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation...
Microengineering and Microelectromechanical systems (MEMS) have very few watertight definitions regarding their subjects...