MPU-6500规格书
MPU-6500是全球首例9轴运动处理传感器。它集成了3轴MEMS陀螺仪，3轴MEMS加速度计，...
mems技术资料
📦 资源总数：83
📄 技术文档：1
💻 源代码：146
📚 mems全部资料 (83个)
Ceramic+Thick+Films+for+MEMS+and+Microdevices
As a student I did my best to avoid text books – a strange statement for a Professor to make and one...
Chemical mechanical polishing
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of m...
CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to le...
Foundations of MEMS
Five years have passed since the first edition of this book was published.Over the five years,the wo...
MEMS+Lorentz+Force+Magnetometers
Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, med...
清华大学半导体封装技术课件
传统集成电路，封装的成本相对较低；但是在某些器件中，封装成本已接近器件成本的1/2；在MEMS/微系统中，封装可能比芯片制造更加困难，成本可能上升为70%～90%；封装已经成为新器件商业化的瓶颈...
传感器资料scb10h
SCB10H series pressure elements are high performance absolute pressure sensors. The sensors are base...
微泵型压电超声波雾化器研究.
随着科学水平的提高，生物、化学以及医疗相关器械领域对精度要求也在不断地提升.生物制剂提取、注射，化学药品传输供给以及药物治疗等MEMS的研究不单单是对精密仪器的攻坚克难，更是交叉学科赋予高精密仪器研究...
博世BMI260六轴传感器参考手册
博世BMI260六轴传感器参考手册，针对智能手机应用的新一代高性能MEMS惯性测量单元(IMU)。...