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In 1939, William R. Hewlett (later of Hewlett-Packardfame) first combined the network described
The field of microelectromechanical systems (MEMS), particularly micromachinedmechanical transducers, has been expanding...
Applications of microelectromechanical systems (MEMS) and microfabrica- tion have spread to different fields of engineer...
Recent advancements in nanotechnology (NT) materials and growth of micro/ nanotechnology have opened the door for potent...
Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various ki...
为了实现液压系统的动态测量，给液压系统的设计以及故障诊断提供理论依据，在已经设计的新型MEMS 流量传感器的基础上，对其结构尺寸进行了进一步的优化，并对MEMS 芯体和优化后的MEMS
RF-MEMS 不仅在体积上小于传统射频器件，易于单片集成，且其性能也优于传统射频器件，此外，RF-MEMS 还可以实现器件多功能配置，如可重构天线。因此，RF-MEMS近年来已成为全世界范围
本文通过大量的文献资料，评述汽车MEMS（微机电系统）传感器的应用现状及发展趋势，其中重点介绍几种传感器的原理和结构，同时对该领域的产业化也进行了探讨。关键词：汽车传感器、微机电系统、力