RF-MEMS器件及其关键工艺技术
RF-MEMS 不仅在体积上小于传统射频器件，易于单片集成，且其性能也优于传统射频器件，此外，RF-MEMS 还可以实现器件多功能配置，如可重构天线。因此，RF-MEMS近年来已成为全世界范围...
MEMS技术技术资料
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Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headl...
基于MEMS技术的倾角传感器的研制
倾角传感器可广泛应用于工业自动化、工程机械、医疗设备等领域，基于MEMS技术和单片机技术研制的倾角传感器，具有7段LCD显示和标准RS-485通讯接口，体积小、功耗低，既可作为检测仪表使用，也可作为测...
MEMS 经典教材
The field of microelectromechanical systems (MEMS), particularly micromachinedmechanical transducers, has been expanding over recent years, and the pr...
Intro To MEMS Eng
A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. The small conference room was ...
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