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MEMS中的封装工艺与半导体工艺中的封装具有一定的相似性!因此!早期MEMS的封装 大多借用半导体中现成的工艺%本文首先介绍了封装的主要形式!然后着重阐述了晶圆级封装与芯片级封装&!’%最后给出了一些商业化的实例%

MEMS真空封装是提高MEMS惯性器件性能的主要手段。本文应用实验方法，在真空熔焊工艺设备上研究了MEMS器件金属外壳真空封装工艺。对不同镀层结构的外壳进行了封装实验比较和气密性测试，结果发现，金属外壳表面镀Ni和镀Au或管座表面镀Ni和Au、管帽表面镀Ni可有效的提高真空封装的气密性和可靠性，其气密性优于5×10-9 Pa·m3 ...

MEMS陀螺在红外成像系统中的研究应用_韩颖

基于MEMS陀螺仪的实时电子稳像技术_范永杰

A major societal challenge for the decades to come will be the delivery of effective medical services while at the same time curbing the growing cost of healthcare. It is expected that new concepts-particularly electronically assisted healthcare will provide an answer. This will include new devices, ...

For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and into production forming a more than $10 billion market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name a few, have seen immense utilization, pa ...

Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS deve ...

A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. The small conference room was packed, and all ears were attentive. Everyone was eager to learn about thismysteriousbuzzword, “MEMS.”Although many in the audience were nodding in ...

Recent advancements in nanotechnology (NT) materials and growth of micro/ nanotechnology have opened the door for potential applications of microelectro- mechanical systems (MEMS)- and NT-based sensors and devices. Such sensors and devices are best suited for communications, medical diagnosis, comme ...

Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passi ...