MPU-6500规格书
MPU-6500是全球首例9轴运动处理传感器。它集成了3轴MEMS陀螺仪，3轴MEMS加速度计，...
mems技术资料
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微机电系统（MEMS,Micro-Electro-MechanicalSystem），也叫做微电子机械系统、微系统、微机械等，指尺寸在几毫米乃至更小的高科技装置。
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查看全部83个资源 »Ceramic+Thick+Films+for+MEMS+and+Microdevices
As a student I did my best to avoid text books – a strange statement for a Professor to make and one that I should clarify before you put this book do...
Chemical mechanical polishing
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density I...
CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies ...
Foundations of MEMS
Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headl...
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