Foundations of MEMS
Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headl...
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The field of microelectromechanical systems (MEMS), particularly micromachinedmechanical transducers, has been expanding over recent years, and the pr...
Intro To MEMS Eng
A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. The small conference room was ...
Microengineering, MEMS, and Interfacing
Microengineering and Microelectromechanical systems (MEMS) have very few watertight definitions regarding their subjects and technologies. Microengine...
Frequency+Tunable+MEMS
For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and into production forming a mor...
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