A novel Ka-band bandpass filter using LIGA micromachined proce
A novel Ka-band bandpass filter using LIGA micromachined proce...
A novel Ka-band bandpass filter using LIGA micromachined proce...
The field of microelectromechanical systems (MEMS), particularly micromachinedmechanical transducers, has been expanding over recent years, and the pr...
Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS reso...