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本文主要超薄芯片的背面金属化中的一些问题，阐述了两种主要的背面金属化工艺的建立，并解决了这两个工艺中关键问题，使得工艺获得好的成品率，提高了产品的可靠性，实现了大规模量产。流程（一）介绍了一种通过技术转移在上海先进半导体制造有限公司（ASM...
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