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https://www.eeworm.com/dl/522284.html
书籍
Microengineering, MEMS, and Interfacing
Microengineering and Microelectromechanical systems (MEMS) have very few
watertight definitions regarding their subjects and technologies. Microengineering
can be described as the techniques, technologies, and practices involved in the
realization of structures and devices with d ...