MEMS
微机电系统（MEMS,Micro-Electro-MechanicalSystem），也叫做微电子机械系统、微系统、微机械等，指尺寸在几毫米乃至更小的高科技装置。
MEMS 热门资料
查看全部 120 份 →Bio-MEMS - Technologies and Applications
Applications of microelectromechanical systems (MEMS) and microfabrica- tion have spread to different fields of engineer...
CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing ...
High+Performance+RF+MEMS
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosensean...
MEMS and Nanotechnology-Based Sensors
Recent advancements in nanotechnology (NT) materials and growth of micro/ nanotechnology have opened the door for potent...
MEMS+Lorentz+Force+Magnetometers
Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation...
MEMS-based+Circuits+and+Systems
Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various ki...