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论文 Chemical mechanical polishing

The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysi ...
https://www.eeworm.com/dl/522274.html
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论文 CMOS MEMS_ A KEY TECHNOLOGY

The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CM ...
https://www.eeworm.com/dl/522275.html
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书籍 High+Performance+RF+MEMS

Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS deve ...
https://www.eeworm.com/dl/522279.html
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书籍 Intro To MEMS Eng

A few years ago I stood before an audience at a customer’s facility explaining the merits of micromachining technology. The small conference room was packed, and all ears were attentive. Everyone was eager to learn about thismysteriousbuzzword, “MEMS.”Although many in the audience were nodding in ...
https://www.eeworm.com/dl/522280.html
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书籍 MEMS-based+Circuits+and+Systems

Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passi ...
https://www.eeworm.com/dl/522283.html
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书籍 Ecological+Design+of+Smart+Home+Networks

In this age of science and technology, the global economy has developed so much that our lifestyles are now extremely modernized and developed. In some ways, modern society seems to have reached the utmost state of advancement in various areas, including eco- nomic development, science and technolog ...
https://www.eeworm.com/dl/522289.html
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书籍 Fundamentals+of+EM+Design+of+Radar

In the present era, low observability is one of the critical requirements in aerospace sector, especially related to defense. The stealth technology essentially relates to shaping and usage of radar absorbing materials (RAM) or radar absorbing struc- tures (RAS). The performance of such radar cross ...
https://www.eeworm.com/dl/522290.html
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书籍 Inside+the+Smart+Home

In 2001, Orange, a UK mobile network operator, announced the “Orange at Home” project, a smart house incorporating the latest technology wizardry built some 20 miles north of London. It was intended to be more than a mere showcase, with plans for real families to move in and live with the smart ho ...
https://www.eeworm.com/dl/522293.html
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书籍 Web Based Enterprise Energy

HIS IS THE THIRD —and most likely the last—book in the series on information technology for energy managers and web based energy infor- mation and control systems. This book concentrates on web based enterprise energy and building automation systems, and serves as a capstone volume in this series. ...
https://www.eeworm.com/dl/522301.html
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书籍 Cognitive+Radio+Networks

Resource allocation is an important issue in wireless communication networks. In recent decades, cognitive radio technology and cognitive radio-based networks have obtained more and more attention and have been well studied to improve spectrum utilization and to overcomethe problem of spectrum scarc ...
https://www.eeworm.com/dl/522307.html
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