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论文 Chemical mechanical polishing
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi-
level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology
in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysi ...
论文 CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available
in many IC foundries. It is cost-effective to leverage the
existing CMOS fabrication technologies to implement
MEMS devices. On the other hand, the MEMS devices
could also add values to the IC industry as the Moore’s law
reaching its limit. The CM ...
书籍 Coriolis Vibratory Gyroscopes
Thanks to the advances in micromachining fabrication technologies and significant
cost reduction due to mass production, miniature sensors of angular rate, or
gyroscopes, found their way into the everyday life of every user of modern gadgets,
such as smart phones, tablets or even wristwatches. Often ...
书籍 Frequency+Tunable+MEMS
For more than three decades, Micro Electro Mechanical Systems (MEMS) have
steadily transitioned out of research labs and into production forming a more than $10 billion
market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name
a few, have seen immense utilization, pa ...
书籍 High+Performance+RF+MEMS
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed
ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale.
The concept of MEMS is attributed to Richard Feynman’s famous talk on December
29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS deve ...
技术资料 FPGA开发全攻略-工程师创新设计宝典-基础篇+技巧篇-200页
FPGA开发全攻略-工程师创新设计宝典-基础篇+技巧篇-200页第一章、为什么工程师要掌握FPGA开发知识？作者：张国斌、田耘2008 年年初，某著名嵌入式系统IT 公司为了帮助其产品售后工程师和在线技术支持工程师更好的理解其产品，举行了ASIC/FPGA 基础专场培训．由于后者因为保密制度而只能接触到板级电路图和LAYOUT，同时因ASI ...