lampflux.m
来自「MDPSAS工具箱是马里兰大学开发的」· M 代码 · 共 38 行
M
38 行
function B = lampflux(N,Rw)% lampflux.m A nonlinear equation model object constructor, derived% from the neqmodel class. Called as%% A = lampflux(N,Rw)%% INPUT PARAMETERS%% N : number of quadrature points% Rw : wafer radius, (m)S = quadgrid('cyln',N,'r',[0 Rw]);h_lamp = 4.5*2.54/100; % mQ_lamp = 2000*3; % W lamp output powerr_lamp = (3+7/8)*2.54/100; % m lamp circle radiusu = 0.8; % lamp power input fraction% Lamp radiant flux distribution at the wafer surface% (basically a placeholder when the object is constructed;% the true value is computed using the evaluate method,% which calls residual.m).Q = scalarfield(S,0);%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%% set up an instance of the lampflux objectvar = assocarray({'Q' Q});param = assocarray({ 'N' N 'S' S 'h_lamp' h_lamp 'Q_lamp' Q_lamp ... 'r_lamp' r_lamp 'u' u 'Rw' Rw});A = naemodel('lampflux',var,param);B = struct([]);B = class(B,'lampflux',A);
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