lampflux.m
来自「MDPSAS工具箱是马里兰大学开发的」· M 代码 · 共 39 行
M
39 行
function B = lampflux(N,Rw)
% lampflux.m A nonlinear equation model object constructor, derived
% from the neqmodel class. Called as
%
% A = lampflux(N,Rw)
%
% INPUT PARAMETERS
%
% N : number of quadrature points
% Rw : wafer radius, (m)
M = mwrmodel('cyln',N,'r',[0 Rw]);
S = get(M,'R');
h_lamp = 4.5*2.54/100; % m
Q_lamp = 2000*3; % W lamp output power
r_lamp = (3+7/8)*2.54/100; % m lamp circle radius
u = 0.8; % lamp power input fraction
% Lamp radiant flux distribution at the wafer surface
% (basically a placeholder when the object is constructed;
% the true value is computed using the evaluate method,
% which calls residual.m).
Q = scalarfield(S,0);
%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
% set up an instance of the lampflux object
var = assocarray({'Q' Q});
param = assocarray({ 'N' N 'S' S 'h_lamp' h_lamp 'Q_lamp' Q_lamp ...
'r_lamp' r_lamp 'u' u 'Rw' Rw});
A = naemodel('lampflux',var,param);
B = struct([]);
B = class(B,'lampflux',A);
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