radialrxrgeom.m

MDPSAS工具箱是马里兰大学开发的

function [A,nowafermax,invalidgeom] = radialrxrgeom(nrp,Ro,Rp,Rs,Rw)

% radialrxrgeom.m Set up the geometry and relevant quadrature grids
%                 for a radial flow reactor system. Called as
%
%          [A,nowafermax,invalidgeom] = radialrxrgeom(nrp,Ro,Rp,Rs,Rw)
%
% INPUT PARAMETERS
%
%        nrp : number of quadrature pts over susceptor
%         Ro : center region radius (m)
%         Rp : platen radius (m)
%         Rs : wafer center radial position on platen (m)

if nargin < 2
    Ro = 10/1000;  % m
end
if nargin < 3
%    Rp = 225/1000; % m
    Rp = 200/1000; % m
end
if nargin < 4
%    Rs = 112.5/1000; % m
    Rs = 110/1000; % m
end
if nargin < 5
%    Rw = 38.1/1000;  % m
    Rw = 50/1000;  % m
end

if nargin == 0
   nrp = 60;
   end

R   = quadgrid('cyln',nrp,'R',[Ro,Rp]);
RSF = qg2sf(R);

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
% check if geometry is valid; compute max number of wafers

invalidgeom = 0;
if Rs < Rw+Ro | Rs > Rp-Rw
    invalidgeom = 1;
    warning('invalid geometry')
end

th = 2*asin(Rw/Rs);
nowafermax = floor(2*pi/th);

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%
% set up an instance of the radialrxrgeom object

A.param = assocarray({ 'R' R 'RSF' RSF 'nrp' nrp ...
                       'Rp' Rp 'Rs' Rs 'Rw' Rw 'Ro' Ro 
                        });

A = class(A,'radialrxrgeom');