microscale glass-blown three-dimensional spherical
2011 microscale glass-blown three-dimensional spherical shell resonators,采用MEMS方法制作微泡谐振器,该谐振器可用于微陀螺,...
2011 microscale glass-blown three-dimensional spherical shell resonators,采用MEMS方法制作微泡谐振器,该谐振器可用于微陀螺,...