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论文 Chemical mechanical polishing
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi-
level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology
in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysi ...
论文 CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available
in many IC foundries. It is cost-effective to leverage the
existing CMOS fabrication technologies to implement
MEMS devices. On the other hand, the MEMS devices
could also add values to the IC industry as the Moore’s law
reaching its limit. The CM ...
书籍 MEMS-based+Circuits+and+Systems
Over many years, RF-MEMS have been a hot topic in research at the technology
and device level. In particular, various kinds of mechanical Si-MEMS resonators
and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The
BAW technology has made its way to commercial products for passi ...
书籍 Deploying+Raspberry+Pi+in+the+Classroom
The Raspberry Pi has become a computing phenomenon. This single-board miniature
computer, first released in February 2012 by the Raspberry Pi Foundation, has grown into
a series of nearly a dozen models that have sold a total of more than 10 million units in
five years.
Inexpensive to buy and to run ...
书籍 Ecodesign+Preparatory+Study
Since the 1990s the EU has been pursuing climate change mitigation targets. Following the
international commitment to the legally binding greenhouse gas reduction under the Kyoto
Protocol, the 2020 policy package consists of a set of binding legislation to ensure that the EU
meets its climate and en ...
书籍 Service+Robotics+within+the+Digital+Home
Over the past few decades there has been an exponential growth in service robots
and smart home technologies, which has led to the development of exciting new
products in our daily lives. Service robots can be used to provide domestic aid for
the elderly and disabled, serving various functions rangi ...
书籍 Big+Data+Analytics+Strategies
This is a practical book, to be sure, but it is also a book about hope and posi-
tive change. I am quite sincere. The delivery of electricity is deeply rooted
in the principle of universal access; when clean, reliable energy is available it
contributes to poverty alleviation, improved social conditi ...
书籍 Fuel+Cell+Micro-grids
The solid high-polymer-film-type fuel cell (PEM-FC) system is used as the power
supply equipment for transportation and replaces an internal combustion engine. A
reduction of the environmental load is expected through the cogeneration system’s
(CGS) use of the PEM-FC system as a distributed power s ...
论文 GaN-on-Si+Displace+Si+and+SiC
GaN is an already well implanted semiconductor
technology, widely diffused in the LED optoelectronics
industry. For about 10 years, GaN devices have also been
developed for RF wireless applications where they can
replace Silicon transistors in some selected systems. That
incursion in the RF field ha ...
书籍 High+Voltage+Engineering
The first edition as well as its forerunner of Kuffel and Abdullah published in
1970 and their translations into Japanese and Chinese languages have enjoyed
wide international acceptance as basic textbooks in teaching senior under-
graduate and postgraduate courses in High-Voltage Engineering. Both ...