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书籍 ESD+Basics

This text, ESD Basics: From Semiconductor Manufacturing to Product Use was initiated on the need to produce a text that addresses fundamentals of electrostatic discharge from the manufacturing environment to today’s products. As the manufacturing world evolves, semi- conductor networks scale, and s ...
https://www.eeworm.com/dl/522263.html
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书籍 Bio-MEMS - Technologies and Applications

Applications of microelectromechanical systems (MEMS) and microfabrica- tion have spread to different fields of engineering and science in recent years. Perhaps the most exciting development in the application of MEMS technol- ogy has occurred in the biological and biomedical areas. In addition to k ...
https://www.eeworm.com/dl/522272.html
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论文 Chemical mechanical polishing

The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi- level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysi ...
https://www.eeworm.com/dl/522274.html
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书籍 Coriolis Vibratory Gyroscopes

Thanks to the advances in micromachining fabrication technologies and significant cost reduction due to mass production, miniature sensors of angular rate, or gyroscopes, found their way into the everyday life of every user of modern gadgets, such as smart phones, tablets or even wristwatches. Often ...
https://www.eeworm.com/dl/522276.html
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书籍 Foundations of MEMS

Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras ...
https://www.eeworm.com/dl/522277.html
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书籍 Frequency+Tunable+MEMS

For more than three decades, Micro Electro Mechanical Systems (MEMS) have steadily transitioned out of research labs and into production forming a more than $10 billion market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name a few, have seen immense utilization, pa ...
https://www.eeworm.com/dl/522278.html
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书籍 High+Performance+RF+MEMS

Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale. The concept of MEMS is attributed to Richard Feynman’s famous talk on December 29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS deve ...
https://www.eeworm.com/dl/522279.html
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书籍 MEMS and Nanotechnology-Based Sensors

Recent advancements in nanotechnology (NT) materials and growth of micro/ nanotechnology have opened the door for potential applications of microelectro- mechanical systems (MEMS)- and NT-based sensors and devices. Such sensors and devices are best suited for communications, medical diagnosis, comme ...
https://www.eeworm.com/dl/522281.html
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书籍 MEMS-based+Circuits+and+Systems

Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passi ...
https://www.eeworm.com/dl/522283.html
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书籍 Microengineering, MEMS, and Interfacing

Microengineering and Microelectromechanical systems (MEMS) have very few watertight definitions regarding their subjects and technologies. Microengineering can be described as the techniques, technologies, and practices involved in the realization of structures and devices with dimensions on the ord ...
https://www.eeworm.com/dl/522284.html
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