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技术资料 MPU-6500规格书
MPU-6500是全球首例9轴运动处理传感器。它集成了3轴MEMS陀螺仪，3轴MEMS加速度计，
书籍 Ceramic+Thick+Films+for+MEMS+and+Microdevices
As a student I did my best to avoid text books – a strange statement for a Professor to make and one that
I should clarify before you put this book down; I did my best to avoid text books that did not help me.
论文 Chemical mechanical polishing
The planarization technology of Chemical-Mechanical-Polishing (CMP), used for the manufacturing of multi-
level metal interconnects for high-density Integrated Circuits (IC), is also readily adaptable as an enabling technology
in MicroElectroMechanical Systems (MEMS) fabrication, particularly polysi ...
论文 CMOS MEMS_ A KEY TECHNOLOGY
The mature CMOS fabrication processes are available
in many IC foundries. It is cost-effective to leverage the
existing CMOS fabrication technologies to implement
MEMS devices. On the other hand, the MEMS devices
could also add values to the IC industry as the Moore’s law
reaching its limit. The CM ...
书籍 Foundations of MEMS
Five years have passed since the first edition of this book was published.Over the five years,the
world has witnessed a technological revolution headlined by an array of exciting consumer and
industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones,
phones with cameras ...
书籍 MEMS+Lorentz+Force+Magnetometers
Nowadays sensors are part of everyday life in a wide variety of fields: scientific
applications, medical instrumentation, industrial field, ...and, last but not least,
popular mass production and low-cost goods, like smartphones and other mobile
devices. Markets and business behind the field of sens ...
技术资料 清华大学半导体封装技术课件
传统集成电路，封装的成本相对较低；但是在某些器件中，封装成本已接近器件成本的1/2；在MEMS/微系统中，封装可能比芯片制造更加困难，成本可能上升为70%～90%；封装已经成为新器件商业化的瓶颈
技术资料 传感器资料scb10h
SCB10H series pressure elements are high performance absolute pressure sensors. The sensors are based  on Murata's proven capacitive 3D-MEMS technology. They enable exceptional possibility for OEM customers  to integrate pressure measurement function in an optimal way into their produc ...
技术资料 微泵型压电超声波雾化器研究.
随着科学水平的提高，生物、化学以及医疗相关器械领域对精度要求也在不断地提升.生物制剂提取、注射，化学药品传输供给以及药物治疗等MEMS的研究不单单是对精密仪器的攻坚克难，更是交叉学科赋予高精密仪器研究发展的难题。技术革新便要理论创新，才能突破现有技术发展的瓶颈。现有的压电超声波雾化器理论发展已颇具成熟， ...
技术资料 博世BMI260六轴传感器参考手册
博世BMI260六轴传感器参考手册，针对智能手机应用的新一代高性能MEMS惯性测量单元(IMU)。