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The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to leverage the existing CMOS fabrication technologies to implement MEMS devices. On the other hand, the MEMS devices could also add values to the IC industry as the Moore’s law reaching its limit. The CM ...

Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras ...

Nowadays sensors are part of everyday life in a wide variety of fields: scientific applications, medical instrumentation, industrial field, ...and, last but not least, popular mass production and low-cost goods, like smartphones and other mobile devices. Markets and business behind the field of sens ...

Identification is pervasive nowadays in daily life due to many complicated activities such as bank and library card reading, asset tracking, toll collecting, restricted access to sensitive data and procedures and target identification. This kind of task can be realized by passwords, bio- metric data ...

传统集成电路，封装的成本相对较低；但是在某些器件中，封装成本已接近器件成本的1/2；在MEMS/微系统中，封装可能比芯片制造更加困难，成本可能上升为70%～90%；封装已经成为新器件商业化的瓶颈

From additive manufacturing to 3D4D printing 3 Breakthrough Innovations Programmable Material, 4D Printing and Bio-printing by André, Jean-Claude (z-lib.org)

SCB10H series pressure elements are high performance absolute pressure sensors. The sensors are based  on Murata's proven capacitive 3D-MEMS technology. They enable exceptional possibility for OEM customers  to integrate pressure measurement function in an optimal way into their produc ...

随着科学水平的提高，生物、化学以及医疗相关器械领域对精度要求也在不断地提升.生物制剂提取、注射，化学药品传输供给以及药物治疗等MEMS的研究不单单是对精密仪器的攻坚克难，更是交叉学科赋予高精密仪器研究发展的难题。技术革新便要理论创新，才能突破现有技术发展的瓶颈。现有的压电超声波雾化器理论发展已颇具成熟， ...

博世BMI260六轴传感器参考手册，针对智能手机应用的新一代高性能MEMS惯性测量单元(IMU)。

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