ldmos1013.in

生成mos管结构

go athena
#
line x loc=0 spac=0.8
line x loc=4 spac=0.4
line x loc=9  spac=0.3
line x loc=11 spac=0.02
line x loc=11.3 spac=0.02
line x loc=11.6 spac=0.02
line x loc=14 spac=0.1
line x loc=16 spac=0.2
line x loc=20 spac=0.3

line y loc=6.00 spac=0.1
line y loc=8.00 spac=0.5
line y loc=12   spac=4

init  c.boron=5.5e19  orientation=100 
deposit silicon thickness=6 c.boron=1e15 div=35 DY=0.01 YDY=0.00
diffus time=18 temp=900 weto2 
deposit photores thickness=2 div=4
etch photores p1.x=4 left

#save outf=1.str
#tonyplot 1.str

#p+sinker implant
#########################################
#########################################
implant boron dose=5e16 energy=80  
etch photores all
#################################
#p+sinker diffuse

deposit nitride thickness=0.15 div=3

diffus time=360 temp=920 weto2 press=10.00 

diffus time=300 temp=1100 nitro 


etch nitride all
etch oxide all

#save outf=P+.str
#tonyplot P+.str
#gate oxide grown here
method grid.ox=0.01
diffus time=80 temp=950 dryo2 press=1.00 hcl=3
extract name="gate ox" thickness oxide mat.occno=1


#depos oxide thick=0.06  div=6
depos poly thick=0.4  div=8
#METHOD PLS
###多晶扩磷
DIFFUSE TIME=30 TEMP=940 c.phosphor=4e20


#save outf=Poly.str
#tonyplot Poly.str

diffus time=20 temp=700 nitro 
etch poly left p1.x=11
etch oxide left p1.x=11
etch poly right p1.x=11.6
etch oxide right p1.x=11.6
#多晶氧化 防止磷外扩散
diffus time=22 temp=900 dryo2

deposit photores thickness=1 div=8
etch photores start x=4 y=-2.5 
etch photores cont x=4 y=0.5
etch photores cont x=11.2 y=0.5
etch photores done x=11.2 y=-2.5


#注入P-
implant boron dose=8e13 energy=60  
etch photores all
#save outf=p-im.str
#tonyplot p-im.str

#############################
#p- diffuse
#method two.dim
diffus time=210 temp=1000 nitro press=1
#diffus time=30 temp=1000  dryo2 press=1 
#save outf=p-diffuse.str
#tonyplot p-diffuse.str
   #LDD implant
deposit photores thickness=1 div=10
etch photores start x=4  y=-2.5
etch photores cont x=4 y=0.5 
etch photores cont x=13.6 y=0.5 
etch photores done x=13.6 y=-2.5
#etch photores right p1.x=4
implant phosphor dose=1e12 energy=70  
etch photores all
deposit photores thickness=1 div=10
etch photores right p1.x=13.4
implant phosphor dose=4e12 energy=80  
etch photores all

structure outf=ldd-1e14.str
tonyplot ldd-1e14.str


#n/d implant
deposit photores thickness=1 div=10
etch photores right p1.x=16
etch photores start x=4  y=-2.5
etch photores cont x=4 y=0.5 
etch photores cont x=11.3 y=0.5 
etch photores done x=11.3 y=-2.5
implant phosphor dose=5e15 energy=80 
etch photores all
#save outf=ndd-1.str
#tonyplot ndd-1.str

deposit photores thickness=1 div=10
etch photores p1.x=4 left

#p+sinker implant
implant boron dose=3e15 energy=25  
etch photores all
#save outf=p+diffuse.str
#tonyplot p+diffuse.str
#method fermi compress
#impurity i.phosph poly /oxide trn.0=0.0

#0.22um Spacer formation
depo oxide thick=0.22 div=6
etch oxide dry thick=0.22

diffuse time=30 temp=900 dryo2 press=1.0

#################################################################################################################################3
deposit oxide thick=0.05 div=1

#save outf=33-1e13.str
#tonyplot 33-1e13.str
#33-1-1e14.str
     
##########field plate
#
# 


 etch oxide left p1.x=6.5
#####################################################################################  
#####################################################################################2.8
deposit tisix thick=0.3 div=10
etch tisix right p1.x=6.7



deposit oxide thick=0.6 div=10
etch oxide  start x=17 y=-5
etch oxide cont x=17 y=0.2
etch oxide cont x=20 y=0.2 
etch oxide done x=20 y=-5

deposit alum thickness=1 div=4
etch alum left p1.x=16.8 


electrode name=gate x=11.3 y=-0.2
electrode name=drain x=18
electrode backside name=source


structure outf=1021-4e12-80.str

tonyplot 1021-4e12-80.str
go devedit
#init infile=1013-1-5e14-1-23.str

base.mesh height=18 width=27
bound.cond apply=false max.ratio=300
constr.mesh max.angle=90 max.ratio=300 max.height=4 max.width=1 \
        min.height=0.0001 min.width=0.0001
constr.mesh type=Semiconductor default
constr.mesh type=Insulator default max.angle=178
constr.mesh type=Metal default max.angle=179

# Define the minimum mesh spacing globally...
imp.refine min.spacing=0.01

# Select a list of solution (impurity) gradients to refine upon....
#imp.refine imp="Arsenic" sensitivity=0.5
imp.refine imp="Boron" sensitivity=0.4
imp.refine imp="Phosphorus" sensitivity=0.5

# now mesh the structure....
mesh
structure outf=mesh8e13.str
go atlas
#test-011um.str
#mesh infile=mesh1.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=10 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
#转移特性
solve init
solve vdrain=0.05
solve vdrain=0.1
solve vstep=0.2 vfinal=1.5 name=drain
solve vstep=0.5 vfinal=10 name=drain
log outf=transfer4e1280.log master
solve vgate=0 vstep=0.1 vfinal=2 name=gate
solve  vstep=0.25 vfinal=10 name=gate
solve  vstep=1 vfinal=20 name=gate  


tonyplot transfer4e1280.log 


go atlas
#test-011um.str
#mesh infile=mesh0909.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
#输出特性
solve init
solve vgate=0.1
solve vgate=0.3
solve vgate=0.5
solve vgate=1 outf=slove_tmp1
solve vgate=3 outf=slove_tmp2
solve vgate=5 outf=slove_tmp3
solve vgate=7 outf=slove_tmp4
solve vgate=9 outf=slove_tmp5

load infile=slove_tmp1
log outf=8e13ldmos1.log
solve  vdrain=0.05
solve  vdrain=0.1
solve  vdrain=0.2
solve  vdrain=0.5
solve name=drain  vfinal=30 vstep=0.5

load infile=slove_tmp2
log outf=8e13ldmos2.log
solve  vdrain=0.05
solve  vdrain=0.1
solve  vdrain=0.2
solve  vdrain=0.5
solve name=drain  vfinal=30 vstep=0.5

load infile=slove_tmp3
log outf=8e13ldmos3.log
solve  vdrain=0.05
solve  vdrain=0.1
solve  vdrain=0.2
solve  vdrain=0.5
solve name=drain  vfinal=30 vstep=0.5

load infile=slove_tmp4
log outf=8e13ldmos4.log

solve  vdrain=0.05
solve  vdrain=0.1
solve  vdrain=0.2
solve  vdrain=0.5
solve name=drain vfinal=30 vstep=0.5

load infile=slove_tmp5
log outf=8e13ldmos5.log

solve  vdrain=0.05
solve  vdrain=0.1
solve  vdrain=0.2
solve  vdrain=0.5
solve name=drain  vfinal=30 vstep=0.5

tonyplot -overlay 8e13ldmos1.log 8e13ldmos2.log 8e13ldmos3.log 8e13ldmos4.log 8e13ldmos5.log -set mos2ex02_log.set
go atlas
#击穿特性
#mesh infile=test-05um.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
log outf=new-8e13um.log
solve init
solve vdrain=0.03
solve vdrain=0.1
solve vdrain=0.25 vstep=0.25 vfinal=2 name=drain 
#solve  vstep=1 vfinal=10 name=drain  
solve  vstep=2.0 vfinal=50 name=drain 
OUTPUT FLOWLINES EFIELD E.LINES
solve  vstep=1 vfinal=100 name=drain compl=1.e-7 cname=drain \
    outf=bv-n8e13.str master onefile 
extract name="bv8e13" max(v."drain")

tonyplot new-8e13um.log

quit










go atlas
#test-011um.str
#mesh infile=mesh0909.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=10 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
solve init
solve vgate=0.1
solve vgate=0.3
solve vgate=0.5
solve vgate=1 outf=slove_tmp1
solve vgate=3 outf=slove_tmp2
solve vgate=5 outf=slove_tmp3
solve vgate=7 outf=slove_tmp4
solve vgate=9 outf=slove_tmp5

load infile=slove_tmp1
log outf=8e13ldmos1.log
solve name=drain vdrain=0 vfinal=30 vstep=0.5

load infile=slove_tmp2
log outf=8e13ldmos2.log
solve name=drain vdrain=0 vfinal=30 vstep=0.5

load infile=slove_tmp3
log outf=8e13ldmos3.log
solve name=drain vdrain=0 vfinal=30 vstep=0.5

load infile=slove_tmp4
log outf=8e13ldmos4.log
solve name=drain vdrain=0 vfinal=30 vstep=0.5

load infile=slove_tmp5
log outf=8e13ldmos5.log
solve name=drain vdrain=0 vfinal=30 vstep=0.5

tonyplot -overlay 8e13ldmos1.log 8e13ldmos2.log 8e13ldmos3.log 8e13ldmos4.log 8e13ldmos5.log -set mos2ex02_log.set
go atlas
#mesh infile=test-05um.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
log outf=new-8e13um.log
solve init
solve vdrain=0.03
solve vdrain=0.1
solve vdrain=0.25 vstep=0.25 vfinal=2 name=drain 
#solve  vstep=1 vfinal=10 name=drain  
solve  vstep=2.0 vfinal=50 name=drain 
OUTPUT FLOWLINES EFIELD E.LINES
solve  vstep=1 vfinal=100 name=drain compl=1.e-7 cname=drain \
    outf=bv-n8e13.str master onefile 
extract name="bv8e13" max(v."drain")

tonyplot new-8e13um.log

quit

go atlas
#cgd
mesh infile=0916.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
solve init
#solve vgate=0 vstep=0.1 vfinal=2 name=gate
solve  vstep=0.5 vfinal=6 name=gate 
log outf=0916-Cgd.log
#Cgd
solve vdrain=0 ac freq=1e6 aname=drain
solve name=drain vstep=0.5 vfinal=30  ac freq=1e6 aname=drain
tonyplot 0916-Cgd.log
go atlas
mesh infile=0916.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
solve init
solve vdrain=0.03
solve vdrain=0.1
solve vdrain=0.25 vstep=0.25 vfinal=2 name=drain
solve vstep=2 vfinal=28 name=drain
solve vstep=0.1 vfinal=1 name=gate
solve vstep=0.5 vfinal=5 name=gate
#s参数
lOG OUTF=mysparams5.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=5.2
lOG OUTF=mysparams52.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=5.4
lOG OUTF=mysparams54.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=5.6
lOG OUTF=mysparams56.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=5.8
lOG OUTF=mysparams58.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=6
lOG OUTF=mysparams6.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=6.2
lOG OUTF=mysparams62.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=6.4
lOG OUTF=mysparams64.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=6.6
lOG OUTF=mysparams66.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=6.8
lOG OUTF=mysparams68.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=7
lOG OUTF=mysparams7.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=7.2
lOG OUTF=mysparams72.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=7.4
lOG OUTF=mysparams74.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
solve vgate=7.6
lOG OUTF=mysparams76.log S.PARAM INPORT=gate OUTPORT=drain \ 
IN2PORT=source OUT2PORT=source WIDTH=75000 RIN=50
solve  ac frequency=1.0e5 fstep=5 mult.freq nfsteps=8 aname=gate
go atlas
#Cdg
mesh infile=0916.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
#交流小信号特性
solve init
solve name=drain vstep=0.5 vfinal=2  
solve vstep=2 vfinal=28 name=drain
#solve vgate=0 vstep=0.1 vfinal=2 name=gate
solve  vstep=0.5 vfinal=6 name=gate 
log outf=0916-Cdg.log
#Cdg
solve vgate=0 ac freq=1e6 aname=drain
solve vstep=0.5 vfinal=20 name=gate ac freq=1e6 aname=drain
tonyplot 0916-Cdg.log
go atlas
# Cgs
mesh infile=0916.str
models cvt srh  BGN AUGER print 
impact E.DIR 
contact name=gate n.poly
interface qf=5e10
method newton trap maxtraps=15 climit=1e-4  ir.tol=1e-30 ix.tol=1e-30
solve init
solve name=drain vstep=0.5 vfinal=2  
solve vstep=2 vfinal=28 name=drain
#solve vgate=0 vstep=0.1 vfinal=2 name=gate
solve  vstep=0.5 vfinal=6 name=gate 
log outf=0916-Cgs.log
#Cdg
solve vgate=0 ac freq=1e6 aname=drain
solve vstep=0.5 vfinal=20 name=gate ac freq=1e6 aname=source
tonyplot 0916-Cgs.log
quit