📄 真空蚀刻技术.mht
字号:
From: <由 Microsoft Internet Explorer 5 保存>
Subject: =?gb2312?B?1ea/1cq0v8y8vMr1?=
Date: Sun, 4 Dec 2005 10:00:36 +0800
MIME-Version: 1.0
Content-Type: text/html;
charset="gb2312"
Content-Transfer-Encoding: base64
Content-Location: http://www.maihui.net/book/pcb9945.htm
X-MimeOLE: Produced By Microsoft MimeOLE V6.00.2800.1409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⌨️ 快捷键说明
复制代码
Ctrl + C
搜索代码
Ctrl + F
全屏模式
F11
切换主题
Ctrl + Shift + D
显示快捷键
?
增大字号
Ctrl + =
减小字号
Ctrl + -