smic018.tech

是一个用与片上集成电感的仿真软件,简单实用!

; SMIC 0.18um Logic/Mixed-Signal/RF Salicide (1P6M, Thick Top Metal, 1.8V/3.3V) process
<chip>

	chipx = 1024		; dimensions of the chip in x direction
	chipy = 1024		; dimensions of the chip in y direction
	fftx = 256		; x-fft size (must be a power of 2)
	ffty = 256		; y-fft size
	TechFile = smic018.tek	; name of this file!
	TechPath = ./
								; pathname where you stored the files
								; which is generated by gendata
	freq = 1.5		; GHz
	eddy = 0		
	eddy = 1		

<layer> 0				; substrate/nwell

	rho = 8				; resistivity (ohm-cm)
	t   = 250			; thickness (microns)
	eps = 11.9		; Permitivity: relative

<layer> 1				; FOX layer

	rho = 1e10		; resistivity (ohm-cm)
	t   = 0.354		; thickness (microns)
	eps = 4.0

<layer>	2				; ILD Layer (ILD1a + ILD1b)

	rho = 1e10		; resistivity, insulator in this case
	t = 0.79			; thickness
	eps = 4.2

<layer> 3				; IMD1a Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 1.18		; thickness
	eps = 3.7

<layer> 4				; IMD1b Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.2			; thickness
	eps = 4.2

<layer> 5				; IMD2a Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 1.18		; thickness
	eps = 3.7

<layer> 6				; IMD2b Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.2			; thickness
	eps = 4.2

<layer> 7				; IMD3a Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 1.18		; thickness
	eps = 3.7

<layer> 8				; IMD3b Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.2			; thickness
	eps = 4.2

<layer> 9				; IMD4a Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 1.18		; thickness
	eps = 3.7

<layer> 10			; IMD4b Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.2			; thickness
	eps = 4.2

<layer> 11			; IMD5a Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 1.18		; thickness
	eps = 3.7

<layer> 12			; IMD5b Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.35		; thickness
	eps = 4.2

<layer> 13			; PASS1 Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 4.67		; thickness
	eps = 4.2

<layer> 14			; PASS3 Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 0.6			; thickness
	eps = 7.9
	
<layer> 15			; Air Layer

	rho = 1e10		; resistivity,insulator in this case
	t   = 10.0			; thickness
	eps = 1.0	

<metal>  0			; substrate tap

	layer = 2			; what layer is the metal in? 
	rsh = 8180.0	; sheet resistance Milli-ohms/Square
	t = 0.2				; thickness of metal
	d = 0.0				; distance from bottom of layer
	name = mpoly	; name to use inside asitic
	color = green	; color in asitic
	
<via> 0       			; metal 1 to substrate

  top = 1           ; via connects up to this metal layer
  bottom = 0        ; via connects down to this metal layer
  r = 15           	; resistance per via
  width = 0.22      ; width of via
  space = 0.25      ; minimum spacing between vias
  overplot1 = 0.1   ; minimum dist to substrate metal 
  overplot2 = 0.06  ; minimum dist to metal 1
  name = via0       ; name in ASITIC
  color = purple    ; color in ASITIC

<metal> 1

	layer = 3
	rsh = 78
	t = 0.53
	d = 0.0
	name = m1
	color = blue
	
<via> 1       			; metal 1 to metal 2

  top = 2
  bottom = 1
  r = 4 
  width = 0.26
  space = 0.26
  overplot1 = 0.06  ; to substrate metal 
  overplot2 = 0.06 	; to metal 1
  name = via1
  color = white

<metal> 2 

	layer = 5
	rsh = 78 
	t   = 0.53
	d = 0.0
  name = m2
	color = red

<via> 2		; metal 2 to metal 3

  top = 3
  bottom = 2
  r = 4 
  width = 0.26
  space = 0.26
  overplot1 = 0.06	; to substrate metal 
  overplot2 = 0.06 	; to metal 1
  name = via2
  color = green

<metal> 3
        
  layer = 7
  rsh = 78 
  t   = 0.53
  d = 0.0
  name = m3
  color = light yellow

<via> 3							; metal 3 to metal 4

  top = 4
  bottom = 3
  r = 4
  width = 0.26
  space = 0.26 
  overplot1 = 0.06
  overplot2 = 0.06
  name = via3
  color = red 

<metal> 4
        
  layer = 9
  rsh = 78 
  t = 0.53 
  d = 0.0
  name = m4
  color = light red 

<via> 4							; metal 4 to metal 5

  top = 5
  bottom = 4
  r = 4
  width = 0.26
  space = 0.26 
  overplot1 = 0.06
  overplot2 = 0.06
  name = via4
  color = grey 

<metal> 5
        
  layer = 11
  rsh = 78 
  t = 0.53 
  d = 0.0
  name = m5
  color = light blue 

<via> 5							; metal 5 to metal 6

  top = 6
  bottom = 5
  r = 2
  width = 0.36
  space = 0.35 
  overplot1 = 0.06
  overplot2 = 0.42
  name = via5
  color = yellow

<metal> 6
        
  layer = 13
  rsh = 19   	
  t = 2.17
  d = 0.0
  name = m6
  color = light green