http:^^dtm.eecs.umich.edu^facil^facilindex.html

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Date: Tuesday, 14-Jan-97 21:39:06 GMTServer: NCSA/1.3MIME-version: 1.0Content-type: text/htmlLast-modified: Friday, 13-Dec-96 18:39:20 GMTContent-length: 6008<HTML>
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<TITLE>DTM: Capabilities and Facilities</TITLE>
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<CENTER><!WA0><IMGSRC="http://dtm.eecs.umich.edu/pics/capfac.br.gif"></CENTER><br><P> TheUniversity of Michigan DTM Center builds its foundations upon many yearsof basic and applied research activities in IC processing and design,electronic device design, solid-state electronic and electro-optic materials research, industrialsimulation and 
modeling, and electronics manufacturing in investigatingthe various issues 
confronting the design and production of flat paneldisplays.<P>

The DTM Center directly uses facilities, laboratories, andinfrastructure, built up over many decades. These include clean roomfacilities like the Solid-State ElectronicsLaboratory (SSEL) or research centers that span electronics manufacturing,sensors technology, plasma processing, or materials reserach.<P>Thelaboratory facilities for DTM include the SSEL clean room, the newElectronics Manufacturing Laboratory(EML) clean room, and numerouslaboratories located in the College of Engineering.<P><br><P><B><FONTSIZE=+2>Solid-State Electronics Laboratory:</FONT></B><HR SIZE=4 WIDTH=265ALIGN=left>
<!WA1><A HREF="http://www.eecs.umich.edu/ssel/">
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SSEL houses a $25 million, 6000square-foot, class 100 clean room facility, the product 
of a decade of investment in solid-state semiconductor faculty , research staff, and 
facilities.  Years of consistent state funding, leveraged with federal grants and contracts, 
have helped the facility evolve into the most modern and complete in the United States for solid-state device research. It is a complete silicon IC and III-V compound device laboratory with facilities that include electron beam lithography, device and circuits characterization, chemical vapor deposition, dry etching, vacuum deposition and CAD facilities. <P> <I>View of the SSEL at the University of Michigan.  
Click on the photo to link to more info on the SSEL and other EECS Dept research.</I>
<br CLEAR=right><br><P><br><P>

<B><FONT SIZE=+2>Center for Integrated Sensors and Circuits:</FONT></B><HR SIZE=4 WIDTH=333 ALIGN=left>
CISC was created to foster increased integration among the many individuals at the University of Michigan engaged 
in research on sensing, data acquisition, and advanced signal processing.  Located in the Solid-State Electronics Lab, CISC maintains world-class process facilities for the fabrication of integrated sensing systems.  Current research 
includes work on materials processing and characterization, three-dimensional microstructures, modeling, high-performance 
interface circuits, biosensors, integrated optoelectronic systems, and microactuators.
<P><br><P>

<B><FONT SIZE=+2>Electronics Manufacturing and Control Systems:</FONT></B><HR SIZE=4 WIDTH=378 ALIGN=left>
EMACS is a ten year old interdisciplinary activity that has a strong university/industrial 
research mission in the areas of sensor-based manufacturing, intelligent equipment, and 
factory automation.  EMACS serves as an important umbrella organization to infuse new 
manufacturing research into the DTM Center.<P>

The EMACS major programs include:<br>
<UL>
	<LI>SRC Center of Excellence in Automated Semiconductor Manufacturing
	<LI>ARPA-funded Sensor Based Manufacturing Project
	<LI>SEMATECH Advanced Equipment Controller Project
	<LI>NSF Manufacturing Education &amp Research
	<LI>NSF Real-time Control of Plasma Etching
</UL>
<P>

Expertise for these programs is drawn from the College of Engineering's departments 
of Electrical Engineering and Computer Science, Chemical Engineering, Nuclear Engineering, 
Industrial and Operations Engineering, Materials Science and Engineering, Mechanical 
Engineering and Applied Mechanics, as well as the departments of Statistics, Physics, 
and Chemistry in the College of Literature, Science and the Arts.<P>
<P><br><P>

<B><FONT SIZE=+2>Collabratory at <!WA4><A HREF="http://www.erim.org"><!WA5><IMG BORDER=1 SRC="http://dtm.eecs.umich.edu/pics/erim.gif"></A>:</FONT></B>
<HR SIZE=4 WIDTH=208 ALIGN=left>
The University of Michigan and the Environmental Research Institute of Michigan have created an alliance 
to foster the development of new technologies in the Greater Ann Arbor Area.  This &quotcollabratory&quot, 
located on ERIM's main campus is adjacent to The Center forDisplay Technology &amp Manufacturing.  Leveraging 
the unique assets andstrengths of both institutions, the lab seeks to form new business linkages with both 
start-up and established global companies involved in a full spectrum of related programs and activities, 
including:<P>

<UL>
	<LI>Electronics &amp Optics Technologies
	<LI>Flat-panel Display Technologies
	<LI>New Display Materials &amp Vehicles
	<LI>Sensor-based Fabrication Equipment
	<LI>Advanced Manufacturing Processes
	<LI>Market &amp Industry Analysis
	<LI>Technology Deployment &amp Commercialization
</UL><P>

The current 8000 SF, single-story building wing houses a variety of suites of office and lab space.
<P><BR><P><P> <B> <FONT SIZE=+2> Electronics Manufacturing Laboratory (EML):</FONT> </B> <HR SIZE=4 WIDTH=378 ALIGN=left> <P><br><P> EML is a new$10 million, 3,000 square-foot class 10 and 100 clean room facility.  It provides a state-of-the-art laboratory environment for focused researchon the design, development, and manufacture of flat panel displays.Plasma etching and deposition, plasma diagnostics, thin filmcharacterization, liquid crystal processing and process controlequipment are housed in EML.  The laboratory is also used to demonstrate state-of-the art fabrication equipment to our industrial partners. <P>


<P>
<!WA6><A HREF="http://dtm.eecs.umich.edu/index.html">Return to DTM Homepage</A><P>
<!WA7><IMG WIDTH=100%SRC="http://dtm.eecs.umich.edu/pics/line.gradiated.gif"><P><P><B>For General Information, Questions or Comments:</B><!WA8><AHREF="mailto:dtm-info@umich.edu">dtm-info@umich.edu</A><P>

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