ch02.3.htm

介绍asci设计的一本书

&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201578">
 </A>
	8.5</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201580">
 </A>
minimum spacing to poly or active edge</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201582">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201584">
 </A>
metal2 (CMS)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201586">
 </A>
	9.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201588">
 </A>
minimum width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201590">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201592">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201594">
 </A>
	9.2.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201596">
 </A>
minimum space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201598">
 </A>
4</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201600">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201602">
 </A>
	9.2.b</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201604">
 </A>
minimum space (for minimum-width wires only)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201606">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201608">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201610">
 </A>
	9.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201612">
 </A>
minimum overlap of via1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201614">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201616">
 </A>
via2 (CVS)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201618">
 </A>
	14.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201620">
 </A>
exact size</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201622">
 </A>
2 <SPAN CLASS="Symbol">
&#165;</SPAN>
 2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201624">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201626">
 </A>
	14.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201628">
 </A>
minimum space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201630">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201632">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201634">
 </A>
	14.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201636">
 </A>
minimum overlap by metal2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201638">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201640">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201642">
 </A>
	14.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201644">
 </A>
minimum spacing to via1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201646">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201648">
 </A>
metal3 (CMT)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201650">
 </A>
	15.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201652">
 </A>
minimum width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201654">
 </A>
6</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201656">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201658">
 </A>
	15.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201660">
 </A>
minimum space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201662">
 </A>
4</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201664">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201666">
 </A>
	15.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201668">
 </A>
minimum overlap of via2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201670">
 </A>
2</P>
</TD>
</TR>
</TABLE>
<TABLE>
<TR>
<TD ROWSPAN="1" COLSPAN="4">
<P CLASS="TableTitle">
<A NAME="pgfId=201680">
 </A>
TABLE&nbsp;2.9&nbsp;MOSIS scalable CMOS rules version 7&#8212;the pads and overglass (passivation).</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201688">
 </A>
<SPAN CLASS="TableHeads">
Layer</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201690">
 </A>
<SPAN CLASS="TableHeads">
	Rule</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201692">
 </A>
<SPAN CLASS="TableHeads">
Explanation</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201694">
 </A>
<SPAN CLASS="TableHeads">
Value</SPAN>
</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201696">
 </A>
glass (COG)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201698">
 </A>
	10.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201701">
 </A>
minimum bonding-pad width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201703">
 </A>
100 <SPAN CLASS="Symbol">
m</SPAN>
m <SPAN CLASS="Symbol">
&#165;</SPAN>
 100 <SPAN CLASS="Symbol">
m</SPAN>
m</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201705">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201707">
 </A>
	10.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201710">
 </A>
minimum probe-pad width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201712">
 </A>
75 <SPAN CLASS="Symbol">
m</SPAN>
m <SPAN CLASS="Symbol">
&#165;</SPAN>
 75 <SPAN CLASS="Symbol">
m</SPAN>
m</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201714">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201716">
 </A>
	10.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201719">
 </A>
pad overlap of glass opening</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201721">
 </A>
6 <SPAN CLASS="Symbol">
m</SPAN>
m</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201723">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201725">
 </A>
	10.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201727">
 </A>
minimum pad spacing to unrelated metal2 (or metal3)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201729">
 </A>
30 <SPAN CLASS="Symbol">
m</SPAN>
m</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201731">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201733">
 </A>
	10.5</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201735">
 </A>
minimum pad spacing to unrelated metal1, poly, or active</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201737">
 </A>
15 <SPAN CLASS="Symbol">
m</SPAN>
m</P>
</TD>
</TR>
</TABLE>
<P CLASS="Body">
<A NAME="pgfId=150469">
 </A>
The rules in Table&nbsp;2.7 and Table&nbsp;2.8 are given as multiples of <SPAN CLASS="Symbol">
l</SPAN>
. If we use <SPAN CLASS="Definition">
lambda-based rules</SPAN>
 we can move between successive process generations just by changing the value of <SPAN CLASS="Symbol">
l</SPAN>
. For example, we can scale 0.5 <SPAN CLASS="Symbol">
m</SPAN>
m layouts (<SPAN CLASS="Symbol">
l</SPAN>
 = 0.25 <SPAN CLASS="Symbol">
m</SPAN>
m) by a factor of 0.175 / 0.25 for a 0.35 <SPAN CLASS="Symbol">
m</SPAN>
m process (<SPAN CLASS="Symbol">
l</SPAN>
 = 0.175 <SPAN CLASS="Symbol">
m</SPAN>
m)&#8212;at least in theory. You may get an inkling of the practical problems from the fact that the values for pad dimensions and spacing in Table&nbsp;2.9 are given in microns and not in <SPAN CLASS="Symbol">
l</SPAN>
. This is because bonding to the pads is an operation that does not scale well. Often companies have two sets of design rules: one in <SPAN CLASS="Symbol">
l</SPAN>
 (with fractional <SPAN CLASS="Symbol">
l</SPAN>
 rules) and the other in microns. Ideally we would like to express all of the design rules in integer multiples of <SPAN CLASS="Symbol">
l</SPAN>
. This was true for revisions 4&#8211;6, but not revision 7 of the MOSIS rules. In revision 7 rules 5.2a/6.2a are noninteger. The original Mead&#8211;Conway NMOS rules include a noninteger 1.5 <SPAN CLASS="Symbol">
l</SPAN>
 rule for the implant layer.</P>
<HR>
<DIV CLASS="footnotes">
<DIV CLASS="footnote">
<P CLASS="TableFootnote">
<SPAN CLASS="footnoteNumber">
1.</SPAN>
<A NAME="pgfId=201365">
 </A>
To ensure source and drain width.</P>
</DIV>
<DIV CLASS="footnote">
<P CLASS="TableFootLast">
<SPAN CLASS="footnoteNumber">
2.</SPAN>
<A NAME="pgfId=201392">
 </A>
Different select types may touch but not overlap.</P>
</DIV>
</DIV>
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