ch02.3.htm

介绍asci设计的一本书

<P CLASS="Table">
<A NAME="pgfId=201384">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201386">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201388">
 </A>
4.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201393">
 </A>
minimum select width and spacing <A HREF="#pgfId=201392" CLASS="footnote">
2</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201395">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201397">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201399">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201401">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201403">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201405">
 </A>
poly contact (CCP)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201407">
 </A>
5.1.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201409">
 </A>
exact contact size</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201411">
 </A>
2 <SPAN CLASS="Symbol">
&#165;</SPAN>
 2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201413">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201415">
 </A>
5.2.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201417">
 </A>
minimum poly overlap</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201419">
 </A>
1.5</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201421">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201423">
 </A>
5.3.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201425">
 </A>
minimum contact spacing</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201427">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201429">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201431">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201433">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201435">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201437">
 </A>
active contact (CCA)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201439">
 </A>
6.1.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201442">
 </A>
exact contact size</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201444">
 </A>
2 <SPAN CLASS="Symbol">
&#165;</SPAN>
 2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201446">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201448">
 </A>
6.2.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201450">
 </A>
minimum active overlap</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201452">
 </A>
1.5</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201454">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201456">
 </A>
6.3.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201458">
 </A>
minimum contact spacing</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201460">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201462">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201464">
 </A>
6.4.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201466">
 </A>
minimum space to gate of transistor</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201468">
 </A>
2</P>
</TD>
</TR>
</TABLE>
<TABLE>
<TR>
<TD ROWSPAN="1" COLSPAN="4">
<P CLASS="TableTitle">
<A NAME="pgfId=201488">
 </A>
TABLE&nbsp;2.8&nbsp;MOSIS scalable CMOS rules version 7&#8212;the process back end.</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201496">
 </A>
<SPAN CLASS="TableHeads">
Layer</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201498">
 </A>
<SPAN CLASS="TableHeads">
	Rule</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201500">
 </A>
<SPAN CLASS="TableHeads">
Explanation</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201502">
 </A>
<SPAN CLASS="TableHeads">
Value /</SPAN>
<SPAN CLASS="Symbol">
  l</SPAN>
</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201504">
 </A>
metal1 (CMF)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201506">
 </A>
	7.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201508">
 </A>
minimum width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201510">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201512">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201514">
 </A>
	7.2.a</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201516">
 </A>
minimum space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201518">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201520">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201522">
 </A>
	7.2.b</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201524">
 </A>
minimum space (for minimum-width wires only)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201526">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201528">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201530">
 </A>
	7.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201532">
 </A>
minimum overlap of poly contact</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201534">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201536">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201538">
 </A>
	7.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201540">
 </A>
minimum overlap of active contact</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201542">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201544">
 </A>
via1 (CVA)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201546">
 </A>
	8.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201548">
 </A>
exact size</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201550">
 </A>
2 <SPAN CLASS="Symbol">
&#165;</SPAN>
 2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201552">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201554">
 </A>
	8.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201556">
 </A>
minimum via spacing</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201558">
 </A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201560">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201562">
 </A>
	8.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201564">
 </A>
minimum overlap by metal1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201566">
 </A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201568">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201570">
 </A>
	8.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201572">
 </A>
minimum spacing to contact</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201574">
 </A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201576">
 </A>