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2.3 CMOS Design Rules</H1>
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Figure 2.11 defines the <SPAN CLASS="Definition">
design rules</SPAN>
for a CMOS process using pictures. Arrows between objects denote a minimum spacing, and arrows showing the size of an object denote a minimum width. Rule 3.1, for example, is the minimum width of poly (2 <SPAN CLASS="Symbol">
l</SPAN>
). Each of the rule numbers may have different values for different manufacturers—there are no standards for design rules. Tables 2.7–2.9 show the MOSIS scalable CMOS rules. Table 2.7 shows the layer rules for the <SPAN CLASS="Definition">
process front end</SPAN>
, which is the front end of the line (as in production line) or <SPAN CLASS="Definition">
FEOL</SPAN>
. Table 2.8 shows the rules for the process back end (<SPAN CLASS="Definition">
BEOL</SPAN>
), the metal interconnect, and Table 2.9 shows the rules for the pad layer and glass layer. </P>
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<IMG SRC="CH02-23.gif" ALIGN="BASELINE">
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FIGURE 2.11 The MOSIS scalable CMOS design rules (rev. 7). Dimensions are in<SPAN CLASS="Symbol">
l</SPAN>
. Rule numbers are in parentheses (missing rule sets 11–13 are extensions to this basic process).</P>
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</TABLE>
<TABLE>
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TABLE 2.7 MOSIS scalable CMOS rules version 7—the process front end.</P>
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<P CLASS="TableFirst">
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<SPAN CLASS="TableHeads">
Layer</SPAN>
</P>
</TD>
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<P CLASS="TableFirst">
<A NAME="pgfId=201230">
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<SPAN CLASS="TableHeads">
Rule</SPAN>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableFirst">
<A NAME="pgfId=201232">
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<SPAN CLASS="TableHeads">
Explanation</SPAN>
</P>
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<SPAN CLASS="TableHeads">
Value</SPAN>
<SPAN CLASS="TableHeads">
/</SPAN>
<SPAN CLASS="Symbol">
l</SPAN>
</P>
</TD>
</TR>
<TR>
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well (CWN, CWP)</P>
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<P CLASS="Table">
<A NAME="pgfId=201238">
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1.1</P>
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<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201240">
</A>
minimum width</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201242">
</A>
10</P>
</TD>
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<TR>
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<P CLASS="TableLeft">
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</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
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1.2</P>
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<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201249">
</A>
minimum space (different potential, a hot well)</P>
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<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201251">
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9</P>
</TD>
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<TR>
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<P CLASS="TableLeft">
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</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
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</A>
1.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201257">
</A>
minimum space (same potential)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201259">
</A>
0 or 6</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201261">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201263">
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1.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201265">
</A>
minimum space (different well type)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201267">
</A>
0</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201269">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
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</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201273">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
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</A>
</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
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</A>
active (CAA)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201279">
</A>
2.1/2.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201281">
</A>
minimum width/space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201283">
</A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201285">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201287">
</A>
2.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201289">
</A>
source/drain active to well edge space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201291">
</A>
5</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201293">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201295">
</A>
2.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201297">
</A>
substrate/well contact active to well edge space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201299">
</A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
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</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201303">
</A>
2.5</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201305">
</A>
minimum space between active (different implant type)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201307">
</A>
0 or 4</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201309">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201311">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201313">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201315">
</A>
</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201317">
</A>
poly (CPG)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201319">
</A>
3.1/3.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201321">
</A>
minimum width/space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201323">
</A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201325">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201327">
</A>
3.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201330">
</A>
minimum gate extension of active</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201332">
</A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201334">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201336">
</A>
3.4</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201339">
</A>
minimum active extension of poly</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201341">
</A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201343">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201345">
</A>
3.5</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201347">
</A>
minimum field poly to active space</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201349">
</A>
1</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201351">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201353">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201355">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201357">
</A>
</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201359">
</A>
select (CSN, CSP)</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201361">
</A>
4.1</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201366">
</A>
minimum select spacing to channel of transistor<A HREF="#pgfId=201365" CLASS="footnote">
1</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201368">
</A>
3</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201370">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201372">
</A>
4.2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201374">
</A>
minimum select overlap of active</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201376">
</A>
2</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201378">
</A>
</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=201380">
</A>
4.3</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=201382">
</A>
minimum select overlap of contact</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
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