📄 ch02.1c.htm
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<TD> <P CLASS="Table"><A NAME="pgfId=170077"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170079"></A><SPAN CLASS="Small"> 90</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170081"></A><SPAN CLASS="Small"> oxide
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170083"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170085"></A><SPAN CLASS="Small"> 29</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170087"></A><SPAN CLASS="Small"> poly
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170089"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170091"></A><SPAN CLASS="Small"> 60</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170093"></A><SPAN CLASS="Small"> Pt
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170095"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170097"></A><SPAN CLASS="Small"> 92</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170099"></A><SPAN CLASS="Small"> nitride
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170101"></A><SPAN CLASS="Small"> 10,000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170103"></A><SPAN CLASS="Small"> 30</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170105"></A><SPAN CLASS="Small"> oxide
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170107"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170109"></A><SPAN CLASS="Small"> 61</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170111"></A><SPAN CLASS="Small"> TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170113"></A><SPAN CLASS="Small"> 2000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170115"></A><SPAN CLASS="Small"> 93</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170117"></A><SPAN CLASS="Small"> pad
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170119"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170121"></A><SPAN CLASS="Small"> 31</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170123"></A><SPAN CLASS="Small"> polycide
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170125"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170127"></A><SPAN CLASS="Small"> 62</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170129"></A><SPAN CLASS="Small"> AlCu/TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170131"></A><SPAN CLASS="Small"> 4000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170133"></A><SPAN CLASS="Small"> 94</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170135"></A><SPAN CLASS="Small"> pad
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170137"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
</TABLE>
</UL>
<P><P CLASS="Exercise"><A NAME="pgfId=176579"></A>Answer: (a) Zero.
(b) 0.999. (c) 0.9998. (d) 3 years.</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=176603"></A>2.8 (Stipple
patterns, 30<SPAN CLASS="White"> </SPAN>min.)</P>
<UL>
<LI><A NAME="pgfId=215125"></A>a. Check the stipple patterns in Figure 2.9.
Using ruled paper draw 8-by-8 stipple patterns for all the combinations
of layers shown.
<LI><A NAME="pgfId=215126"></A>b. Repeat part a for Figure 2.10.
</UL>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=72719"></A>2.9 (Select, 20<SPAN CLASS="White"> </SPAN>min.)
Can you draw a design-rule correct (according to the design rules in Tables
2.72.9) layout with a piece of select that has a minimum width of 2<SPAN CLASS="Symbol">
l</SPAN> (rule 4.4)?</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=54836"></A>2.10 (*Inverter
layout, 60<SPAN CLASS="White"> </SPAN>min.)
Using 1/4-inch ruled paper (or similar) draw a minimum-size inverter (W/L<SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>1
for both <SPAN CLASS="EmphasisPrefix"> p</SPAN> -channel and <SPAN CLASS="EmphasisPrefix">
n</SPAN> -channel transistors). Use a scale of one square to 2<SPAN CLASS="Symbol">
l</SPAN> and the design rules in Table 2.7Table 2.9. Do not use
m2 or m3only m1. Draw the nwell, pwell, ndiff, and pdiff layers, but not
the implant layers or the active layer. Include connections to the input,
output, VDD, and VSS in m1. There must be at least one well connection to
each well (<SPAN CLASS="EmphasisPrefix"> n</SPAN> -well to VDD, and <SPAN CLASS="EmphasisPrefix">
p</SPAN> -well to VSS). Minimize the size of your cell BB. Draw the BB outline
and write its size in <SPAN CLASS="Symbol"> l</SPAN> <SUP CLASS="Superscript">
2</SUP> on your drawing. Use green diagonal stripes for ndiff, brown diagonal
stripes for pdiff, red diagonal stripes for poly, blue diagonal stripes
for m1, solid black for contact). Include a key on your drawing, and clearly
label the input, output, VDD, and VSS contacts.</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=153256"></A>2.11 (*AOI221
Layout, 120<SPAN CLASS="White"> </SPAN>min.)
Layout the AOI221 shown in Figure 2.13 with the design rules of Tables
2.72.9 and using Figure 1.3 as a guide. Label clearly the m1 corresponding
to the inputs, output, VDD bus, and GND (VSS) bus. Remember to include substrate
contacts. What is the size of your BB in <SPAN CLASS="Symbol"> l</SPAN>
<SUP CLASS="Superscript"> 2</SUP> ?</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=16020"></A>2.12 (Resistance,
20<SPAN CLASS="White"> </SPAN>min.)</P>
<UL>
<LI><A NAME="pgfId=215129"></A>a. Using the values for sheet resistance
shown in Table 2.3, calculate the resistance of a 200<SPAN CLASS="Symbol">
l</SPAN> long (in the direction of current flow) by 3<SPAN CLASS="Symbol">
l</SPAN> wide piece of each of the layers.
<LI><A NAME="pgfId=215130"></A>b. Estimate the resistance of an 8-inch,
10<SPAN CLASS="White"> </SPAN><SPAN CLASS="Symbol">
W<SPAN CLASS="White"> </SPAN></SPAN> cm, <SPAN CLASS="EmphasisPrefix">
p</SPAN> -type, <100> wafer, measured (i) from edge to edge across
a diameter and (ii) from face center to the face center on the other side.
</UL>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=131440"></A>2.13 (*Layout
graphics, 120<SPAN CLASS="White"> </SPAN>min.)
Write a tutorial for capturing layout. As an example:</P>
<P><P CLASS="Exercise"><A NAME="pgfId=137096"></A>To capture EPSF (encapsulated
PostScript format) from Tanner Research's L-Edit for documentation, Macintosh
version... Create a black-and-white technology file, use Setup, Layers...,
in L-Edit. The method described here does not work well for grayscale or
color. Use File, Print..., Destination check button File to print from L-Edit
to an EPS (encapsulated PostScript) file. After you choose Save, a dialog
box appears. Select Format: EPS Enhanced Mac Preview, ASCII, Level 1
Compatible, Font Inclusion: None. Save the file. Switch to Frame. Create
an Anchored Frame. Use File, Import, File... to bring up a dialog box. Check
button Copy into Document, select Format: EPSF. Import the EPS file that
will appear as a "page image". Grab the graphic inside the Anchored
Frame and move the "page image" around. There will be a footer
with text on the "page image" that you may want to hide by using
the Anchored Frame edges to crop the image.</P>
<P><P CLASS="Exercise"><A NAME="pgfId=137103"></A>Your instructions should
be precise, concise, assume nothing, and use the names of menu items, buttons
and so on exactly as they appear to the user. Most of the layout figures
in this book were created using L-Edit running on a Macintosh, with labels
added in FrameMaker. Most of the layouts use the Compass layout editor.</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=106162"></A>2.14 (Transistor
resistance, 20<SPAN CLASS="White"> </SPAN>min.)
Calculate <SPAN CLASS="EquationVariables"> I</SPAN> <SUB CLASS="Subscript">
DS</SUB> and the resistance (the DC value <SPAN CLASS="EquationVariables">
V</SPAN> <SUB CLASS="SubscriptVariable"> DS</SUB> /<SPAN CLASS="EquationVariables">
I</SPAN> <SUB CLASS="SubscriptVariable"> DS</SUB> as well as the AC value
<IMG SRC="CH02-119.gif" ALIGN="BASELINE" WIDTH="54" HEIGHT="18" NATURALSIZEFLAG=
"3"> as appropriate) of long-channel transistors with the following parameters,
under the specified conditions. In each case state whether the transistor
is in the saturation region, linear region, or off:</P>
<P><P CLASS="Exercise"><A NAME="pgfId=106171"></A><B>(i)</B> <SPAN CLASS="EmphasisPrefix">
n</SPAN> -channel: <SPAN CLASS="EquationNumber"> V</SPAN> <SUB CLASS="Subscript">
t</SUB> <SUB CLASS="SubscriptVariable"> n</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.5<SPAN CLASS="White"> </SPAN>V,
<SPAN CLASS="Symbol"> b</SPAN> <SUB CLASS="SubscriptVariable"> n</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>40<SPAN CLASS="White"> </SPAN><SPAN CLASS="Symbol">
m</SPAN> AV<SUP CLASS="Superscript"> 2</SUP> :</P>
<P><P CLASS="Exercise"><A NAME="pgfId=106165"></A><SPAN CLASS="EquationVariables">
V</SPAN> <SUB CLASS="SubscriptVariable"> GS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>3.3V:
<B>a.</B> <SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>3.3<SPAN CLASS="White"> </SPAN>V
<B>b.</B> <SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.0<SPAN CLASS="White"> </SPAN>V
<B>c.</B> <SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
GS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.0<SPAN CLASS="White"> </SPAN>V,
<SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>3.3<SPAN CLASS="White"> </SPAN>V</P>
<P><P CLASS="Exercise"><A NAME="pgfId=106167"></A><B>(ii)</B> <SPAN CLASS="EmphasisPrefix">
p</SPAN> -channel: <SPAN CLASS="EquationNumber"> V</SPAN> <SUB CLASS="Subscript">
t</SUB> <SUB CLASS="SubscriptVariable"> p</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.6<SPAN CLASS="White"> </SPAN>V,
<SPAN CLASS="Symbol"> b</SPAN> <SUB CLASS="SubscriptVariable"> p</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>20<SPAN CLASS="White"> </SPAN><SPAN CLASS="Symbol">
m</SPAN> AV<SUP CLASS="Superscript"> 2</SUP> :</P>
<P><P CLASS="Exercise"><A NAME="pgfId=106168"></A><SPAN CLASS="EquationVariables">
V</SPAN> <SUB CLASS="SubscriptVariable"> GS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.0<SPAN CLASS="White"> </SPAN>V:
<B>a.</B> <SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>0.0<SPAN CLASS="White"> </SPAN>V
<B>b. </B><SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>5.0<SPAN CLASS="White"> </SPAN>V
<B>c.</B> <SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
GS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>5.0<SPAN CLASS="White"> </SPAN>V,
<SPAN CLASS="EquationVariables"> V</SPAN> <SUB CLASS="SubscriptVariable">
DS</SUB> <SPAN CLASS="White"> </SPAN>=<SPAN CLASS="White"> </SPAN>5.0<SPAN CLASS="White"> </SPAN>V</P>
<P><P CLASS="ExerciseHead"><A NAME="pgfId=200687"></A>2.15 (Circuit
theory, 15<SPAN CLASS="White"> </SPAN>min.)
You accidentally created the "inverter" shown in Figure 2.35
on a full-custom ASIC currently being fabricated. Will it work? Your manager
wants a yes or no answer. Your group is a little more understanding: You
are to make a presentation to them to explain the problems ahead. Prepare
two foils as well as a one page list of alternatives and recommendations.</P>
<P><TABLE BORDER="0" CELLSPACING="2" CELLPADDING="0">
<TR>
<TD><P CLASS="TableFigTitleSide"><A NAME="pgfId=200699"></A>FIGURE 2.35 A
CMOS "inverter" with n-channel and p-channel transistors swapped
(Problem 2.15).</TD>
<TD><P><P CLASS="TableFigure"><A NAME="pgfId=200704"></A> </P>
<P><IMG SRC="CH02-120.gif" WIDTH="89" HEIGHT="96" NATURALSIZEFLAG="3" ALIGN=
"BOTTOM"></TD></TR>
</TABLE>
<P CLASS="ExerciseHead"><A NAME="pgfId=200705"></A>2.16 (Mask resolution,
10<SPAN CLASS="White"> </SPAN>min.) People use
LaserWriters to make printed-circuit boards all the time.</P>
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