📄 ch02.1c.htm
字号:
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169827"></A><SPAN CLASS="Small"> 76</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169829"></A><SPAN CLASS="Small"> m2
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169831"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169833"></A><SPAN CLASS="Small"> 15</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169835"></A><SPAN CLASS="Small"> active
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169837"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169839"></A><SPAN CLASS="Small"> 46</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169841"></A><SPAN CLASS="Small"> ESD
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169843"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169845"></A><SPAN CLASS="Small"> 77</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169847"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169849"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169851"></A><SPAN CLASS="Small"> 16</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169853"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169855"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169857"></A><SPAN CLASS="Small"> 47</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169859"></A><SPAN CLASS="Small"> ESD
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169861"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169863"></A><SPAN CLASS="Small"> 78</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169865"></A><SPAN CLASS="Small"> base
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169867"></A><SPAN CLASS="Small"> 6000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169869"></A><SPAN CLASS="Small"> 17</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169871"></A><SPAN CLASS="Small"> field
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169873"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169875"></A><SPAN CLASS="Small"> 48</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169877"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169879"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169881"></A><SPAN CLASS="Small"> 79</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169883"></A><SPAN CLASS="Small"> SOG
coat 1/2</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169885"></A><SPAN CLASS="Small"> 3000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169887"></A><SPAN CLASS="Small"> 18</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169889"></A><SPAN CLASS="Small"> field
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169891"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169893"></A><SPAN CLASS="Small"> 49</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169895"></A><SPAN CLASS="Small"> p+
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169897"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169899"></A><SPAN CLASS="Small"> 80</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169901"></A><SPAN CLASS="Small"> SOG
cure/etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169903"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169905"></A><SPAN CLASS="Small"> 19</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169907"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169909"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169911"></A><SPAN CLASS="Small"> 50</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169913"></A><SPAN CLASS="Small"> p+
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169915"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169917"></A><SPAN CLASS="Small"> 81</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169919"></A><SPAN CLASS="Small"> cap
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169921"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169923"></A><SPAN CLASS="Small"> 20</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169925"></A><SPAN CLASS="Small"> field
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169927"></A><SPAN CLASS="Small"> 5000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169929"></A><SPAN CLASS="Small"> 51</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169931"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169933"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169935"></A><SPAN CLASS="Small"> 82</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169937"></A><SPAN CLASS="Small"> via2
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169939"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169941"></A><SPAN CLASS="Small"> 21</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169943"></A><SPAN CLASS="Small"> nitride
2 strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169945"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169947"></A><SPAN CLASS="Small"> 52</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169949"></A><SPAN CLASS="Small"> implant
anneal</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169951"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169953"></A><SPAN CLASS="Small"> 83</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169955"></A><SPAN CLASS="Small"> via2
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169957"></A><SPAN CLASS="Small"> 2500</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169959"></A><SPAN CLASS="Small"> 22</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169961"></A><SPAN CLASS="Small"> sacrificial
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169963"></A><SPAN CLASS="Small"> 300</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169965"></A><SPAN CLASS="Small"> 53</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169967"></A><SPAN CLASS="Small"> LPCVD
oxide dep. </SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169969"></A><SPAN CLASS="Small"> 1500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169971"></A><SPAN CLASS="Small"> 84</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169973"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169975"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169977"></A><SPAN CLASS="Small"> 23</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169979"></A><SPAN CLASS="Small"> Vt
adjust implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169981"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169983"></A><SPAN CLASS="Small"> 54</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169985"></A><SPAN CLASS="Small"> BPSG
dep./densify</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169987"></A><SPAN CLASS="Small"> 4000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169989"></A><SPAN CLASS="Small"> 85</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169991"></A><SPAN CLASS="Small"> TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169993"></A><SPAN CLASS="Small"> 2000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169995"></A><SPAN CLASS="Small"> 24</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169997"></A><SPAN CLASS="Small"> gate
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169999"></A><SPAN CLASS="Small"> 80</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170001"></A><SPAN CLASS="Small"> 55</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170003"></A><SPAN CLASS="Small"> contact
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170005"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170007"></A><SPAN CLASS="Small"> 86</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170009"></A><SPAN CLASS="Small"> AlCu/TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170011"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170013"></A><SPAN CLASS="Small"> 25</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170015"></A><SPAN CLASS="Small"> LPCVD
poly dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170017"></A><SPAN CLASS="Small"> 1500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170019"></A><SPAN CLASS="Small"> 56</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170021"></A><SPAN CLASS="Small"> contact
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170023"></A><SPAN CLASS="Small"> 2500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170025"></A><SPAN CLASS="Small"> 87</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170027"></A><SPAN CLASS="Small"> m3
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170029"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170031"></A><SPAN CLASS="Small"> 26</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170033"></A><SPAN CLASS="Small"> deglaze</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170035"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170037"></A><SPAN CLASS="Small"> 57</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170039"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170041"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170043"></A><SPAN CLASS="Small"> 88</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170045"></A><SPAN CLASS="Small"> m3
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170047"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170049"></A><SPAN CLASS="Small"> 27</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170051"></A><SPAN CLASS="Small"> WSi
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170053"></A><SPAN CLASS="Small"> 1500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170055"></A><SPAN CLASS="Small"> 58</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170057"></A><SPAN CLASS="Small"> Pt
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170059"></A><SPAN CLASS="Small"> 200</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170061"></A><SPAN CLASS="Small"> 89</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170063"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170065"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170067"></A><SPAN CLASS="Small"> 28</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170069"></A><SPAN CLASS="Small"> LPCVD
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=170071"></A><SPAN CLASS="Small"> 750</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170073"></A><SPAN CLASS="Small"> 59</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=170075"></A><SPAN CLASS="Small"> Pt
sinter</SPAN></TD>
⌨️ 快捷键说明
复制代码
Ctrl + C
搜索代码
Ctrl + F
全屏模式
F11
切换主题
Ctrl + Shift + D
显示快捷键
?
增大字号
Ctrl + =
减小字号
Ctrl + -