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<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169581"></A><SPAN CLASS="Small"> 1</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169583"></A><SPAN CLASS="Small"> substrate</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169585"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169587"></A><SPAN CLASS="Small"> 32</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169589"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169591"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169593"></A><SPAN CLASS="Small"> 63</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169595"></A><SPAN CLASS="Small"> m1
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169597"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169599"></A><SPAN CLASS="Small"> 2</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169601"></A><SPAN CLASS="Small"> oxide
1 dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169603"></A><SPAN CLASS="Small"> 500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169605"></A><SPAN CLASS="Small"> 33</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169607"></A><SPAN CLASS="Small"> WSi
anneal</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169609"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169611"></A><SPAN CLASS="Small"> 64</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169613"></A><SPAN CLASS="Small"> m1
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169615"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169617"></A><SPAN CLASS="Small"> 3</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169619"></A><SPAN CLASS="Small"> nitride
1 dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169621"></A><SPAN CLASS="Small"> 1500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169623"></A><SPAN CLASS="Small"> 34</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169625"></A><SPAN CLASS="Small"> nLDD
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169627"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169629"></A><SPAN CLASS="Small"> 65</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169631"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169633"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169635"></A><SPAN CLASS="Small"> 4</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169637"></A><SPAN CLASS="Small"> n-well
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169639"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169641"></A><SPAN CLASS="Small"> 35</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169643"></A><SPAN CLASS="Small"> nLDD
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169645"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169647"></A><SPAN CLASS="Small"> 66</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169649"></A><SPAN CLASS="Small"> base
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169651"></A><SPAN CLASS="Small"> 6000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169653"></A><SPAN CLASS="Small"> 5</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169655"></A><SPAN CLASS="Small"> n-well
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169657"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169659"></A><SPAN CLASS="Small"> 36</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169661"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169663"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169665"></A><SPAN CLASS="Small"> 67</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169667"></A><SPAN CLASS="Small"> SOG
coat1/2</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169669"></A><SPAN CLASS="Small"> 3000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169671"></A><SPAN CLASS="Small"> 6</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169673"></A><SPAN CLASS="Small"> n-well
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169675"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169677"></A><SPAN CLASS="Small"> 37</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169679"></A><SPAN CLASS="Small"> pLDD
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169681"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169683"></A><SPAN CLASS="Small"> 68</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169685"></A><SPAN CLASS="Small"> SOG
cure/etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169687"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169689"></A><SPAN CLASS="Small"> 7</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169691"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169693"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169695"></A><SPAN CLASS="Small"> 38</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169697"></A><SPAN CLASS="Small"> pLDD
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169699"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169701"></A><SPAN CLASS="Small"> 69</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169703"></A><SPAN CLASS="Small"> cap
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169705"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169707"></A><SPAN CLASS="Small"> 8</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169709"></A><SPAN CLASS="Small"> blocking
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169711"></A><SPAN CLASS="Small"> 2000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169713"></A><SPAN CLASS="Small"> 39</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169715"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169717"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169719"></A><SPAN CLASS="Small"> 70</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169721"></A><SPAN CLASS="Small"> via1
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169723"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169725"></A><SPAN CLASS="Small"> 9</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169727"></A><SPAN CLASS="Small"> nitride
1 strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169729"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169731"></A><SPAN CLASS="Small"> 40</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169733"></A><SPAN CLASS="Small"> spacer
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169735"></A><SPAN CLASS="Small"> 3000</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169737"></A><SPAN CLASS="Small"> 71</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169739"></A><SPAN CLASS="Small"> via1
etch</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169741"></A><SPAN CLASS="Small"> 2500</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169743"></A><SPAN CLASS="Small"> 10</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169745"></A><SPAN CLASS="Small"> p-well
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169747"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169749"></A><SPAN CLASS="Small"> 41</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169751"></A><SPAN CLASS="Small"> WSi
anneal</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169753"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169755"></A><SPAN CLASS="Small"> 72</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169757"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169759"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169761"></A><SPAN CLASS="Small"> 11</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169763"></A><SPAN CLASS="Small"> p-well
drive</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169765"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169767"></A><SPAN CLASS="Small"> 42</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169769"></A><SPAN CLASS="Small"> SD
oxide dep</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169771"></A><SPAN CLASS="Small"> 200</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169773"></A><SPAN CLASS="Small"> 73</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169775"></A><SPAN CLASS="Small"> TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169777"></A><SPAN CLASS="Small"> 2000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169779"></A><SPAN CLASS="Small"> 12</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169781"></A><SPAN CLASS="Small"> active
oxide dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169783"></A><SPAN CLASS="Small"> 250</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169785"></A><SPAN CLASS="Small"> 43</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169787"></A><SPAN CLASS="Small"> n+
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169789"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169791"></A><SPAN CLASS="Small"> 74</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169793"></A><SPAN CLASS="Small"> AlCu/TiW
dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169795"></A><SPAN CLASS="Small"> 4000</SPAN></TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169797"></A><SPAN CLASS="Small"> 13</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169799"></A><SPAN CLASS="Small"> nitride
2 dep.</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169801"></A><SPAN CLASS="Small"> 1500</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169803"></A><SPAN CLASS="Small"> 44</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169805"></A><SPAN CLASS="Small"> n+
implant</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169807"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169809"></A><SPAN CLASS="Small"> 75</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169811"></A><SPAN CLASS="Small"> m2
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169813"></A><SPAN CLASS="Small"> </SPAN>
</TD></TR>
<TR>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169815"></A><SPAN CLASS="Small"> 14</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169817"></A><SPAN CLASS="Small"> active
mask</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169819"></A><SPAN CLASS="Small"> </SPAN>
</TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169821"></A><SPAN CLASS="Small"> 45</SPAN></TD>
<TD> <P CLASS="TableLeft"><A NAME="pgfId=169823"></A><SPAN CLASS="Small"> resist
strip</SPAN></TD>
<TD> <P CLASS="Table"><A NAME="pgfId=169825"></A><SPAN CLASS="Small"> </SPAN>
</TD>
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