ch02.a.htm

介绍asci设计的一本书

</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169785">
 </A>
43</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169787">
 </A>
n+ mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169789">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169791">
 </A>
74</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169793">
 </A>
AlCu/TiW dep.</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169795">
 </A>
	4000</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169797">
 </A>
13</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169799">
 </A>
nitride 2 dep.</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169801">
 </A>
	1500</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169803">
 </A>
44</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169805">
 </A>
n+ implant</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169807">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169809">
 </A>
75</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169811">
 </A>
m2 mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169813">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169815">
 </A>
14</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169817">
 </A>
active mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169819">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169821">
 </A>
45</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169823">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169825">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169827">
 </A>
76</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169829">
 </A>
m2 etch</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169831">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169833">
 </A>
15</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169835">
 </A>
active etch</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169837">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169839">
 </A>
46</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169841">
 </A>
ESD mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169843">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169845">
 </A>
77</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169847">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169849">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169851">
 </A>
16</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169853">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169855">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169857">
 </A>
47</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169859">
 </A>
ESD implant</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169861">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169863">
 </A>
78</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169865">
 </A>
base oxide dep.</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169867">
 </A>
	6000</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169869">
 </A>
17</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169871">
 </A>
field mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169873">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169875">
 </A>
48</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169877">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169879">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169881">
 </A>
79</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169883">
 </A>
SOG coat 1/2</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169885">
 </A>
	3000</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169887">
 </A>
18</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169889">
 </A>
field implant</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169891">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169893">
 </A>
49</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169895">
 </A>
p+ mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169897">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169899">
 </A>
80</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169901">
 </A>
SOG cure/etch</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169903">
 </A>
	&#8211;4000</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169905">
 </A>
19</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169907">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169909">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169911">
 </A>
50</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169913">
 </A>
p+ implant</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169915">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169917">
 </A>
81</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169919">
 </A>
cap oxide dep.</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169921">
 </A>
	4000</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169923">
 </A>
20</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169925">
 </A>
field oxide dep.</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169927">
 </A>
	5000</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169929">
 </A>
51</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169931">
 </A>
resist strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169933">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169935">
 </A>
82</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169937">
 </A>
via2 mask</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169939">
 </A>
&nbsp;</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169941">
 </A>
21</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169943">
 </A>
nitride 2 strip</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169945">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169947">
 </A>
52</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169949">
 </A>
implant anneal</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169951">
 </A>
&nbsp;</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169953">
 </A>
83</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169955">
 </A>
via2 etch</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="Table">
<A NAME="pgfId=169957">
 </A>
	&#8211;2500</P>
</TD>
</TR>
<TR>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169959">
 </A>
22</P>
</TD>
<TD ROWSPAN="1" COLSPAN="1">
<P CLASS="TableLeft">
<A NAME="pgfId=169961">
 </A>
sacrificial oxide dep.</P>
</TD>