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📁 介绍asci设计的一本书
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33</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169607">

 </A>

WSi anneal</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169609">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169611">

 </A>

64</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169613">

 </A>

m1 etch</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169615">

 </A>

&nbsp;</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169617">

 </A>

3</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169619">

 </A>

nitride 1 dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169621">

 </A>

	1500</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169623">

 </A>

34</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169625">

 </A>

nLDD mask</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169627">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169629">

 </A>

65</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169631">

 </A>

resist strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169633">

 </A>

&nbsp;</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169635">

 </A>

4</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169637">

 </A>

n-well mask</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169639">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169641">

 </A>

35</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169643">

 </A>

nLDD implant</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169645">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169647">

 </A>

66</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169649">

 </A>

base oxide dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169651">

 </A>

	6000</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169653">

 </A>

5</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169655">

 </A>

n-well etch</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169657">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169659">

 </A>

36</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169661">

 </A>

resist strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169663">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169665">

 </A>

67</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169667">

 </A>

SOG coat1/2</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169669">

 </A>

	3000</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169671">

 </A>

6</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169673">

 </A>

n-well implant</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169675">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169677">

 </A>

37</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169679">

 </A>

pLDD mask</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169681">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169683">

 </A>

68</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169685">

 </A>

SOG cure/etch</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169687">

 </A>

	&#8211;4000</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169689">

 </A>

7</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169691">

 </A>

resist strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169693">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169695">

 </A>

38</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169697">

 </A>

pLDD implant</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169699">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169701">

 </A>

69</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169703">

 </A>

cap oxide dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169705">

 </A>

	4000</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169707">

 </A>

8</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169709">

 </A>

blocking oxide dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169711">

 </A>

	2000</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169713">

 </A>

39</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169715">

 </A>

resist strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169717">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169719">

 </A>

70</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169721">

 </A>

via1 mask</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169723">

 </A>

&nbsp;</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169725">

 </A>

9</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169727">

 </A>

nitride 1 strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169729">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169731">

 </A>

40</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169733">

 </A>

spacer oxide dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169735">

 </A>

	3000</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169737">

 </A>

71</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169739">

 </A>

via1 etch</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169741">

 </A>

	&#8211;2500</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169743">

 </A>

10</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169745">

 </A>

p-well implant</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169747">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169749">

 </A>

41</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169751">

 </A>

WSi anneal</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169753">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169755">

 </A>

72</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169757">

 </A>

resist strip</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169759">

 </A>

&nbsp;</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169761">

 </A>

11</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169763">

 </A>

p-well drive</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169765">

 </A>

&nbsp;</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169767">

 </A>

42</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169769">

 </A>

SD oxide dep</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169771">

 </A>

	200</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169773">

 </A>

73</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169775">

 </A>

TiW dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169777">

 </A>

	2000</P>

</TD>

</TR>

<TR>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169779">

 </A>

12</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="TableLeft">

<A NAME="pgfId=169781">

 </A>

active oxide dep.</P>

</TD>

<TD ROWSPAN="1" COLSPAN="1">

<P CLASS="Table">

<A NAME="pgfId=169783">

 </A>

	250</P>
12345

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