ams12.rul

MicroWind第2代

MICROWIND 1.0
*
* AMS 1.2 祄 CMOS
*
*
* 12 May 1996 by Etienne Sicard
* Modified :   9-Jun-97 : Adapt to microwind
*             25-Aug-97 : Add thickness, Res
*             11-Sept-97 : Change layer names
*                        : Fit contacts and vias
*             12-Sept-97 : Layers modif
*             22-Sept-97 : Layer thickness
*
* Warning : CIF wrong, 
*           Res wrong
*           ctk wrong
*           thickness wrong
*           verifiy maxdv ...
*  
NAME AMS 1.2祄 CMOS
*
lambda = 0.60
*
* Design rules associated to each layer
*
r101 = 9     { well }
r102 = 12
*
r201 = 4     { diffusion }
r202 = 3
r203 = 5
r204 = 5
*
r301 = 2     { poly }
r302 = 2
r303 = 2
r304 = 3
r305 = 1
r306 = 3
r307 = 2
*
r401 = 2       { contact }
r402 = 3
r403 = 2
r404 = 2
r405 = 2
r406 = 3      { contact to gate }
*
r501 = 4      { metal }
r502 = 3
*
r601 = 3     { via }
r602 = 4
r603 = 4
r604 = 2
r605 = 3    { via to poly }
*
r701 = 5      { metal 2 }
r702 = 3
r703 = 2
*
* Pads
*
rp01 = 167    { pad size  }
rp02 = 167    { pad spacing }
rp03 = 7      { pad border to via }
rp04 = 12     { pad border to opening passiv }
rp05 = 35     { pad to next active area }
rp06 = 75     { test pad 30 鎚 for probing }
*
*
*
* Thickness of layers 
*
thpoly = 0.5
hepoly = 0.4
thme = 0.8
heme = 1.2
thm2 = 1.1
hem2 = 2.5
thpass = 1.0
hepass = 4.0
thnit = 0.5
henit = 5.0
*
* Resistance (ohm / square)
*
repo = 25
reme = 0.075
rem2 = 0.040
*
* Parasitic capacitances
*
cpoOxyde = 1600   (all in aF/祄2)
cpobody = 63
cmebody = 29
cmepoly = 53
cmelineic = 44   (aF/祄)
cm2body = 16
cm2poly = 21
cm2lineic = 42  (aF/祄)
cm2metal = 35
cdndiffp = 360
cdpdiffn = 340
cldn = 350      (aF/祄)
cldp = 220
*
* Crosstalk
*
cmextk = 10      (Lineic capacitance for crosstalk coupling in aF/祄)
cm2xtk = 10      (C is computed using Cx=cmextk*l/spacing)
*
*
* Nmos Model level 3
*
NMOS
l3kp = 80e-6
l3vto = 0.70    Vtn in Volt
l3ld = -0.08
l3theta = 0.1
l3gamma = 0.4
l3phi = 0.70
l3kappa = 0.01
l3vmax = 150e3
l3nss = 0.060
*
* Pmos Model level 3
*
PMOS
l3kp = 25e-6
l3vto = -0.76
l3ld  = -0.03
l3theta = 0.1
l3gamma = 0.4
l3phi = 0.70
l3kappa = 0.045
l3vmax = 70e3
l3nss = 0.060
*
*
* CIF&GDS2
* MicroWind name, Cif name, Gds2 n